Author： Anashin V. Zhukov A. Krasnov A. Semenov A.
Publisher： MAIK Nauka/Interperiodica
ISSN： 0020-4412
Source： Instruments and Experimental Techniques, Vol.52, Iss.6, 2009-11, pp. : 882-885
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
By Subramanian B. Ashok K. Selvan G. Kumar V. Senthil Jayachandran M.
Surface Engineering, Vol. 26, Iss. 8, 2010-11 ,pp. :
Access to resources
Recommend
Advanced Coatings Through Pulsed Magnetron Sputtering
By Kelly P.J. Hisek J. Zhou Y. Pilkington R.D. Arnell R.D.
Surface Engineering, Vol. 20, Iss. 3, 2004-06 ,pp. :
S PHASE COATINGS PRODUCED BY UNBALANCED MAGNETRON SPUTTERING
Surface Engineering, Vol. 12, Iss. 1, 1996-01 ,pp. :
S phase coatings produced by unbalanced magnetron sputtering
Surface Engineering, Vol. 12, Iss. 2, 1996-01 ,pp. :
Deposition of Ti-Si-N films on Al substrates by magnetron sputtering
By Pang J Bai Y Qin F Pan L Zhao Y Kang R
Surface Engineering, Vol. 29, Iss. 10, 2013-11 ,pp. :