A source of gas, vapor, metal, and carbon ions based on a low-pressure hollow-cathode discharge

Author: Semenov A.   Semenova I.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 0020-4412

Source: Instruments and Experimental Techniques, Vol.53, Iss.3, 2010-05, pp. : 449-453

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