A rapid thermal processing system for the deposition of silicon carbide layers on silicon

Author： Montgomery John H.   Ruddell Fred H.   McNeill David W.   Armstrong B. Mervyn   Gamble Harold S.  

Publisher： Inderscience Publishers

ISSN： 0268-1900

Source： International Journal of Materials and Product Technology, Vol.11, Iss.1-2, 1996-11, pp. : 166-177

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