Computer-aided design for microelectromechanical systems (MEMS)

Author： Lee Y.C.   McCarthy B.   Diao J.   Zhang Z.   Harsh K.F.  

Publisher： Inderscience Publishers

ISSN： 0268-1900

Source： International Journal of Materials and Product Technology, Vol.18, Iss.4-5, 2003-07, pp. : 356-380

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