Strain and stress analysis of the oxide film surface in the chemical mechanical polishing process

Author: Lin Yeou-Yih   Lo Ship-Peng   Chen Cheng-Yung  

Publisher: Inderscience Publishers

ISSN: 0952-8091

Source: International Journal of Computer Applications in Technology, Vol.26, Iss.4, 2006-08, pp. : 233-241

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Abstract