Modelling and analysis of pad surface topography and slurry particle size distribution effects on material removal rate in chemical mechanical planarisation

Author： Wang Changxue   Sherman Peter   Chandra Abhijit  

Publisher： Inderscience Publishers

ISSN： 1368-2148

Source： International Journal of Manufacturing Technology and Management, Vol.7, Iss.5-6, 2005-09, pp. : 504-529

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