Determination of Nitrogen in Silicon Carbide by Secondary Ion Mass Spectrometry

Author: Ber B. Ya.   Kazantsev D. Yu.   Kalinina E. V.   Kovarskii A. P.   Kossov V. G.   Hallen A.   Yafaev R. R.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1061-9348

Source: Journal of Analytical Chemistry, Vol.59, Iss.3, 2004-03, pp. : 250-254

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Abstract