Uniformity of Optical Constants in Amorphous Ta₂O₅ Thin Films as Measured by Spectroscopic Ellipsometry

Author： Shvets V. A. Gritsenko D. V. Aliev V. Sh. Chikichev* S. I. Rykhlitskii S. V.

ISSN： 1063-7397

Source： Russian Microelectronics, Vol.33, Iss.5, 2004-09, pp. : 285-291

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