Testing the electromigration resistance of Al metallization patterns by electrical-resistance measurement

Author: Gorlov M.   Plebanovich V.   Strogonov A.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7397

Source: Russian Microelectronics, Vol.35, Iss.4, 2006-07, pp. : 235-242

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Abstract