Author: Gorlov M. Plebanovich V. Strogonov A.
Publisher: MAIK Nauka/Interperiodica
ISSN: 1063-7397
Source: Russian Microelectronics, Vol.35, Iss.4, 2006-07, pp. : 235-242
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Making Al Metallization Patterns
By Smolin V. K.
Russian Microelectronics, Vol. 33, Iss. 1, 2004-01 ,pp. :
By Bober B. Bochenek A. Olszewska-Mateja B. Zaluk Z.
Microelectronics International, Vol. 24, Iss. 1, 2007-01 ,pp. :