Room temperature preparation of c axis oriented ZnO films on Si(100), SiO2, and ZnO substrates by rf magnetron sputtering

Author： Kim N. H.   Kim H. W.  

Publisher： Maney Publishing

ISSN： 1743-2766

Source： British Ceramic Transactions, Vol.103, Iss.1, 2004-02, pp. : 15-18

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