Lithographic tools for producing patterned films composed of gas phase generated nanocrystals

Author: Otten F.   Auer U.   Kruis F. E.   Prost W.   Tegude F. J.   Fissan H.  

Publisher: Maney Publishing

ISSN: 1743-2847

Source: Materials Science and Technology, Vol.18, Iss.7, 2002-07, pp. : 717-720

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