Mechanical property optimisation of materials by nanostructuring: reduction of residual compressive stress in ta-C film

Author: Lee C.-S.   Lee K.-R.   Suh S.-H.  

Publisher: Maney Publishing

ISSN: 1743-2847

Source: Materials Science and Technology, Vol.20, Iss.8, 2004-08, pp. : 993-995

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Abstract