Variation in boron doping by planar diffusion – a comparative study of computational hydrodynamics and experimental observations

Author： Shanmugasundaram S.   Biernacki J. J.   Subramanian R.  

Publisher： Maney Publishing

ISSN： 1743-2847

Source： Materials Science and Technology, Vol.21, Iss.9, 2005-09, pp. : 1103-1110

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