Effect of microstructure on hardness of submicrometre thin films and nanostructured devices

Author： Bull S J   Sanderson L   Moharrami N   Oila A  

Publisher： Maney Publishing

ISSN： 1743-2847

Source： Materials Science and Technology, Vol.28, Iss.9-10, 2012-10, pp. : 1177-1185

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