Replication of sub-micrometre features using microsystems technology

Author: Pirskanen J.   Immonen J.   Kalima V.   Pietarinen J.   Siitonen S.   Kuittinen M.   Mönkkönen K.   Pakkanen T.   Suvanto M.   Pääkkönen E. J.  

Publisher: Maney Publishing

ISSN: 1743-2898

Source: Plastics, Rubber and Composites, Vol.34, Iss.5-6, 2005-06, pp. : 222-226

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