Nitrogen doping of amorphous DLC films by rf plasma dissociated nitrogen atom surface bombardment in a vacuum

Author: Ogwu A.A.   Magill D.   Maguire P.   McLaughlin J.   McCullough R.W.   Voulot D.  

Publisher: Maney Publishing

ISSN: 1743-2944

Source: Surface Engineering, Vol.16, Iss.5, 2000-10, pp. : 427-430

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Abstract