Coatings tribology drivers for high density plasma technologies

Author： Dearnley P. A.   Neville A.   Turner S.   Scheibe H.-J.   Tietema R.   Tap R.   Stüber M.   Hovsepian P.   Layyous A.   Stenbom B.  

Publisher： Maney Publishing

ISSN： 1743-2944

Source： Surface Engineering, Vol.26, Iss.1-2, 2010-02, pp. : 80-96

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