SIMULATION OF COUPLED IMPURITIES DIFFUSION UNDER OXIDIZING CONDITIONS. APPLICATION TO THE OPTIMIZATION OF THE p-WELLS IN CMOS TECHNOLOGY

Author： DEPEURSINGE Y. GUEX L. MORET J.M. WEISS P.

Publisher： Emerald Group Publishing Ltd

ISSN： 0332-1649

Source： COMPEL: Int J for Computation and Maths. in Electrical and Electronic Eng., Vol.2, Iss.4, 1993-12, pp. : 149-160

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