Measured density of copper atoms in the ground and metastable states in argon magnetron discharge correlated with the deposition rate

Author： Naghshara H   Sobhanian S   Khorram S   Sadeghi N  

Publisher： IOP Publishing

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.44, Iss.2, 2011-01, pp. : 25202-25215

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