Thermal conductivity of aluminium nitride thin films prepared by reactive magnetron sputtering

Author： Duquenne C Besland M-P Tessier P Y Gautron E Scudeller Y Averty D

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.45, Iss.1, 2012-01, pp. : 15301-15308

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Kinetic properties of TiN thin films prepared by reactive magnetron sputtering

By Solovan M. Brus V. Maryanchuk P. Kovalyuk T. Rappich J. Gluba M.

Physics of the Solid State, Vol. 55, Iss. 11, 2013-11 ,pp. : 2234-2238

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

Magnetic properties of iron nitride films obtained by reactive magnetron sputtering

By Chebotkevich L. Vorob’ev Yu. Pisarenko I.

Physics of the Solid State, Vol. 40, Iss. 4, 1998-04 ,pp. : 650-651

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

V-Doped ZnO Thin Films Prepared by RF Magnetron Sputtering

By Shao W. D. Chen X. F. Ren W. Shi P. Wu X. Q. Tan O. K. Zhu W. G. Yao X.

Ferroelectrics, Vol. 406, Iss. 1, 2010-01 ,pp. : 10-15

Taylor & Francis Ltd

Access to resources Recommend Favorite

Reactive Gas Magnetron Sputtering of Lithium Hydride and Lithium Fluoride Thin Films

By Thompson G.B. Allred D.D.

Journal of X-Ray Science and Technology, Vol. 7, Iss. 2, 1997-06 ,pp. : 159-170

Ios Press

Access to resources Recommend Favorite

Obtaining Au thin films in atmosphere of reactive nitrogen through magnetron sputtering

Journal of Physics: Conference Series , Vol. 687, Iss. 1, 2016-02 ,pp. : 29-33

IOP Publishing

Access to resources Recommend Favorite