Influence of the oxygen partial pressure and post-deposition annealing on the structure and optical properties of ZnO films grown by dc magnetron sputtering at room temperature

Author: Yuste M   Galindo R Escobar   Caretti I   Torres R   Sánchez O  

Publisher: IOP Publishing

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.45, Iss.2, 2012-01, pp. : 25303-25313

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Abstract