High-accuracy interferometric measurements of flatness and parallelism of a step gauge

Author: Kruger O. A.  

Publisher: IOP Publishing

ISSN: 0026-1394

Source: Metrologia, Vol.38, Iss.3, 2001-06, pp. : 237-240

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract