Design and Characterization of Evanescently Coupled Uni-Traveling Carrier Photodiodes with a Multimode Diluted Waveguide Structure

Author: Yun-Xiao Zhang   Jiao-Qing Pan   Ling-Juan Zhao   Hong-Liang Zhu   Wei Wang  

Publisher: IOP Publishing

ISSN: 0256-307X

Source: Chinese Physics Letters, Vol.27, Iss.2, 2010-02, pp. : 28501-28504

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Abstract

A new evanescently coupled uni-traveling carrier photodiode (EC-UTC-PD) is designed, fabricated and characterized, which incorporates a multimode diluted waveguide structure and UTC active waveguide structure together. A high responsivity of 0.68A/Wat 1.55-μm without an anti-reflection coating, a linear photocurrent responsivity of more than 21 mA, and a large −1 dB vertical alignment tolerance of 2.5 μm are achieved.

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