The Effect of Current Density on CNx Crystal Grain Growth in Electrochemical Deposition

Author: Wei-Feng Yu   Rong-Gen Cao   Yu Tian   Jian-Zhong Wang   Xi-Jing Ning  

Publisher: IOP Publishing

ISSN: 0256-307X

Source: Chinese Physics Letters, Vol.28, Iss.2, 2011-02, pp. : 28104-28106

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