Effects of a Ni alloying element on Al–Ni metallization

Author： Lee K W   Han D M   Jeong K H   Lee K B   Lee J G   Jeong C O   Bae Y H   Ruh H   Kim C S   Lee E G  

Publisher： IOP Publishing

ISSN： 0268-1242

Source： Semiconductor Science and Technology, Vol.27, Iss.1, 2012-01, pp. : 15021-15026

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