Performing three-dimensional measurements on micro-scale features using a flexible coordinate measuring machine fiber probe with ellipsoidal tip

Author: Muralikrishnan B   Stone J   Shakarji C   Stoup J  

Publisher: IOP Publishing

ISSN: 0957-0233

Source: Measurement Science and Technology, Vol.23, Iss.2, 2012-02, pp. : 25002-25010

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Abstract