Tunable MEMS capacitors using vertical carbon nanotube arrays grown on metal lines

Author: Arun Anupama     Idda Tonio   Acquaviva Donatello   Badia Montserrat Fernandez-Bolanos   Pantigny Philippe   Salet Paul    

Publisher: IOP Publishing

ISSN: 0957-4484

Source: Nanotechnology, Vol.22, Iss.2, 2011-01, pp. : 25203-25211

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Abstract