Embedded layer of Ag nanoparticles prepared by a combined PECVD/PVD process producing SiOxCy–Ag nanocomposite thin films

Author: Bedel Laurent   Cayron Cyril   Jouve Michel   Maury Francis  

Publisher: IOP Publishing

ISSN: 0957-4484

Source: Nanotechnology, Vol.23, Iss.1, 2012-01, pp. : 15603-15610

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