The realization and performance of vibration energy harvesting MEMS devices based on an epitaxial piezoelectric thin film

Author： Isarakorn D   Briand D   Janphuang P   Sambri A   Gariglio S   Triscone J-M   Guy F   Reiner J W   Ahn C H   de Rooij N F  

Publisher： IOP Publishing

ISSN： 0964-1726

Source： Smart Materials and Structures, Vol.20, Iss.2, 2011-02, pp. : 25015-25025

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