Time Resolved Actinometric Study of Pulsed RF Oxygen Discharge

Author: Jašík J.   Macko P.   Martišovitš V.   Lukáč P.   Veis P.  

Publisher: Springer Publishing Company

ISSN: 0011-4626

Source: Czechoslovak Journal of Physics, Vol.54, Iss.6, 2004-06, pp. : 661-676

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Abstract