UV degradability of polysilanes for nanoresists examined by electron spectroscopies and photoluminescence

Author: Kuritka I.   Schauer F.   Saha P.   Zemek J.   Jiricek P.   Nespurek S.  

Publisher: Springer Publishing Company

ISSN: 0011-4626

Source: Czechoslovak Journal of Physics, Vol.56, Iss.1, 2006-01, pp. : 41-50

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Abstract