Physical Properties of Titanium Oxide Thin Films Prepared by DC Magnetron Sputtering: Influence Substrate Temperature and O2/Ar in the Gas Mixture

Author： Hantehzadeh M.   Amouha M.   Solaymani S.   Osati T.   Ghobadi B.  

Publisher： Springer Publishing Company

ISSN： 0164-0313

Source： Journal of Fusion Energy, Vol.32, Iss.6, 2013-12, pp. : 622-626

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