Solidification and interfacial interactions in gold–tin system during eutectic or thermo-compression bonding for 200 mm MEMS wafer level hermetic packaging

Author: Garnier Arnaud   Baillin Xavier   Hodaj Fiqiri  

Publisher: Springer Publishing Company

ISSN: 0957-4522

Source: Journal of Materials Science: Materials in Electronics, Vol.24, Iss.12, 2013-12, pp. : 5000-5013

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Abstract