Fundamental Investigation of the Wear Progression of Silicon Atomic Force Microscope Probes

Author: Chung Koo-Hyun   Lee Yong-Ha   Kim Hae-Jin   Kim Dae-Eun  

Publisher: Springer Publishing Company

ISSN: 1023-8883

Source: Tribology Letters, Vol.52, Iss.2, 2013-11, pp. : 315-325

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Abstract