Effects of ceric ammonium nitrate (CAN) additive in HNO3 solution on the electrochemical behaviour of ruthenium for CMP processes

Author： Lee W.-J.   Park H.-S.   Lee S.-I.   Sohn H.-C.  

Publisher： Springer Publishing Company

ISSN： 0021-891X

Source： Journal of Applied Electrochemistry, Vol.34, Iss.1, 2004-01, pp. : 119-125

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