Effect of preliminary annealing of silicon substrates on the spectral sensitivity of photodetectors in bipolar integrated circuits

Author: Blynskii V.   Bozhatkin O.   Golub E.   Lemeshevskaya A.   Shvedov S.  

Publisher: Springer Publishing Company

ISSN: 0021-9037

Source: Journal of Applied Spectroscopy, Vol.77, Iss.3, 2010-07, pp. : 445-447

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