Synthesis of HMDS Radical Terminated Perhydropolysilazane

Author: Shimizu Y.   Suzuki K.   Funayama O.  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.33, Iss.20, 1998-10, pp. : 5025-5028

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content