Characterization of borophosphosilicate glass soot fabricated by flame hydrolysis deposition for silica-on-silicon device applications

Author: Choi C-G.   Jeong M-Y.   Choy T-G.  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.34, Iss.24, 1999-12, pp. : 6035-6040

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