Gas-phase synthesis of amorphous silicon nitride — reaction paths and powder characteristics

Author: Ziegenbalg G.   Focke T.   Holldorf H.   Brink R.   Lange H.  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.34, Iss.9, 1999-05, pp. : 2199-2206

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Abstract