WO3 thin film prepared by PECVD technique and its gas sensing properties to NO2

Author: Tong M.   Dai G.   Wu Y.   He X.   Gao D.  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.36, Iss.10, 2001-05, pp. : 2535-2538

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Abstract