Effect of deposition inhomogeneity on the Ohm resistance of thin electroless copper layers

Author: Radoeva M.   Radoev B.   Stöckelhuber K.W.  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.38, Iss.12, 2003-06, pp. : 2703-2707

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Abstract