A nano-indentation study on the plasticity length scale effects in LIGA Ni MEMS structures

Author： Lou J.   Shrotriya P.   Buchheit T.   Yang D.   Soboyejo W. O.  

Publisher： Springer Publishing Company

ISSN： 0022-2461

Source： Journal of Materials Science, Vol.38, Iss.20, 2003-10, pp. : 4137-4143

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