CNx/TiNy films prepared by ion-beam sputtering

Author： Yu D.L.   He J.L.   Liu S.M.   Li D.C.   Tian Y.J.   Yanagisawa O.  

Publisher： Springer Publishing Company

ISSN： 0022-2461

Source： Journal of Materials Science, Vol.38, Iss.7, 2003-04, pp. : 1471-1477

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