A new understanding of near-threshold damage for 200 keV irradiation in silicon

Author： Stoddard N.   Duscher G.   Windl W.   Rozgonyi G.  

Publisher： Springer Publishing Company

ISSN： 0022-2461

Source： Journal of Materials Science, Vol.40, Iss.14, 2005-07, pp. : 3639-3650

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