Preparation of highly oriented aluminum nitride thin films on molybdenum bottom electrodes using metal interlayers

Author： Akiyama M.   Ueno N.   Tateyama H.   Nagao K.   Yamada T.  

Publisher： Springer Publishing Company

ISSN： 0022-2461

Source： Journal of Materials Science, Vol.40, Iss.5, 2005-03, pp. : 1159-1162

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