Contribution of dynamic charging effects into dopant contrast mechanisms in silicon

Author: Chakk Yuli   Horvitz Dror  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.41, Iss.14, 2006-07, pp. : 4554-4560

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract