Growth of highly c-axis oriented aluminum nitride thin films on β-tantalum bottom electrodes

Author: Akiyama M.   Ueno N.   Nagao K.   Yamada T.  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.41, Iss.14, 2006-07, pp. : 4691-4694

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