Microdefects induced by cavitation for gettering in silicon wafer

Author: Macodiyo Dan   Soyama Hitoshi   Masakawa Takashi   Hayashi Kazuo  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.41, Iss.16, 2006-08, pp. : 5380-5382

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Abstract