Substrate temperature and water vapour effects on structural and mechanical properties of TiO x N y coatings

Author: Chappé J.   Gavoille J.   Martin N.   Lintymer J.   Takadoum J.  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.41, Iss.17, 2006-09, pp. : 5639-5645

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Abstract