Effects of the deposition and patterning processes of the top electrode on the ferroelectric properties of Pt/Pb(Zr,Ti)O3/Pt thin film capacitors

Author: Lee Eun   Lee Jae   Kim Sun  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.42, Iss.11, 2007-06, pp. : 3772-3777

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